MEMS and NEMS - micro (and nano) electromechanical systems

Roshdy A. Abdelrassoul


MEMS and NEMS use and application is growing and their market is expanding. With the development of 5G and IoT technologies the number of MEMS components is always increasing.

In this paper an introduction to MEMS/NEMS definition, categories, and advantages. Fabrication techniques of MEMS/NEMS are discussed. Finally, an elaborative analysis of the different applications of MEMS/NEMS, followed by a discussion of the future of Micro / Nano electromechanical Systems.


MEMS; NEMS; Micro Electromechanical Systems; Nano Electromechanical Systems;

Full Text:



Andrea Picco, “Materials, Sensors and Actuators in MEMS technology evolution”, It-fab, 2020.

Jr-Lung (Eddie) Lin, I-Shuo University, Taiwan, “Microelectromechanical Systems (MEMS) An introduction”, 2015.

An Overview of Various MEMS Devices and their Applications, Circuit Digest, December 11, 2019.

Allen, James J., Micro electro mechanical system design, Taylor & Francis, 2005.

Abdullah Saleh Algamili, Mohd Haris Md. Khir, John Ojur Dennis, Abdelaziz Yousif Ahmed, Sami Sultan Alabsi, Saeed Salem Ba Hashwan and Mohammed M. Junaid, “A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices”, Nanoscale Res Lett (2021) 16:16.

Jianxiong Zhu, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, Bowei Dong and Chengkuo Lee, “Development Trends and Perspectives of Future Sensors and MEMS/NEMS”, Micromachines 2020, 11, 7; doi:10.3390/mi11010007.

Jeremy A. Walraven, “Introduction to Microelectromechanical Systems (MEMS) Materials, Fabrication Processes and Failure Analysis”, Sandia National Laboratories, 2008.

Gustavo Lopez Badilla, Benjamin Valdez Salas, Michael Schorr Wiener and Carlos Raúl Navarro González, “Microscopy and Spectroscopy Analysis of Mems Corrosion Used in the Electronics Industry of the Baja California Region, Mexico”, From The Edited Volume Air Quality.

Yole Dévelopement, “MEMS industry: the headwinds from COVID-19 and the way forward”, Extracted from: Status of the MEMS Industry, 2020.

QuadroCopter: Inertial measurement unit (IMU). 9 Degrees of Freedom - Razor IMU - AHRS compatible.

Ayman El-Fatatry, Inertial Measurement Units – IMU, Paper presented at the RTO AVT Lecture Series on “MEMS Aerospace Applications”, published in RTO EDUCATIONAL Notes, RTO Educational Notes RTO-EN -AVT-105, Feb. 2004.

Rachel E. Morgan, Ewan S. Douglas, Gregory W. Allan, Paul Bierden, Supriya Chakrabarti, Timothy Cook, Mark Egan, Gabor Furesz, Jennifer N. Gubner, Tyler D. Groff, Christian A. Haughwout, Bobby G. Holden, Christopher B. Mendillo, Mireille Ouellet, Paula do Vale Pereira, Abigail J. Stein, Simon Thibault, Xingtao Wu,Yeyuan Xin and Kerri L. Cahoy, “MEMS Deformable Mirrors for Space-BasedHigh-Contrast Imaging”, Micromachines 2019,10, 366. doi:10.3390/

High-performance electrostatic MEMS vibration energy harvester, OFF GRID Energy independence, IDTechEx.

Raghu Das, “Energy Harvesting and Storage 2014-2024: Forecasts, Technologies, and Players”.

i-MicroNEWS, “A brave new MEMS world: a $18.2B market by 2026”,



  • There are currently no refbacks.

Copyright (c) 2022 Roshdy A. Abdelrassoul

Creative Commons License
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.

Advances in Computing and Engineering
E-ISSN: 2735-5985
P-ISSN: 2735-5977

Published by:

Academy Publishing Center (APC)
Arab Academy for Science, Technology and Maritime Transport (AASTMT)
Alexandria, Egypt