MEMS and NEMS - micro (and nano) electromechanical systems

Roshdy A. Abdelrassoul

Abstract


MEMS and NEMS use and application is growing and their market is expanding. With the development of 5G and IoT technologies the number of MEMS components is always increasing.

In this paper an introduction to MEMS/NEMS definition, categories, and advantages. Fabrication techniques of MEMS/NEMS are discussed. Finally, an elaborative analysis of the different applications of MEMS/NEMS, followed by a discussion of the future of Micro / Nano electromechanical Systems.


Keywords


MEMS; NEMS; Micro Electromechanical Systems; Nano Electromechanical Systems;

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DOI: http://dx.doi.org/10.21622/ace.2022.02.1.058

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Copyright (c) 2022 Roshdy A. Abdelrassoul

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This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.


Advances in Computing and Engineering
E-ISSN: 2735-5985
P-ISSN: 2735-5977

Published by:

Academy Publishing Center (APC)
Arab Academy for Science, Technology and Maritime Transport (AASTMT)
Alexandria, Egypt
ace@aast.edu