MEMS and NEMS - micro (and nano) electromechanical systems
Abstract
MEMS and NEMS use and application is growing and their market is expanding. With the development of 5G and IoT technologies the number of MEMS components is always increasing.
In this paper an introduction to MEMS/NEMS definition, categories, and advantages. Fabrication techniques of MEMS/NEMS are discussed. Finally, an elaborative analysis of the different applications of MEMS/NEMS, followed by a discussion of the future of Micro / Nano electromechanical Systems.
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DOI: http://dx.doi.org/10.21622/ace.2022.02.1.058
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Copyright (c) 2022 Roshdy A. Abdelrassoul
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Advances in Computing and Engineering
E-ISSN: 2735-5985
P-ISSN: 2735-5977
Published by:
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Arab Academy for Science, Technology and Maritime Transport (AASTMT)
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